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ZHAO Yi, CHEN Shu-fen. Modeling and Simulation of MOEMS Gyroscope Based on TE-TM Mode Converter[J]. JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2009, 18(3): 309-312.
Citation: ZHAO Yi, CHEN Shu-fen. Modeling and Simulation of MOEMS Gyroscope Based on TE-TM Mode Converter[J].JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2009, 18(3): 309-312.
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Modeling and Simulation of MOEMS Gyroscope Based on TE-TM Mode Converter

  • School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

  • Received Date:2008-09-12
    Abstract
  • A novel structure design of micro optic electro mechanical system (MOEMS) gyroscope is presented in this paper. The structure combining surface acoustic wave (SAW) sensor, optical waveguide diffractive component, electro-optical modulator etc. is integrated on a LiNbO 3substrate as the gyroscope for sensing rotating angular velocity, and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device. The principles of the MOEMS are discussed in the paper, and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
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    • References (10)
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